Collisionless electron heating in an inductively coupled discharge.

Turner, null

doi:10.1103/PhysRevLett.71.1844

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Collisionless electron heating in an inductively coupled discharge.

Author(s): Turner

Publication date (Electronic): Sep 20 1993

Journal: Physical review letters

Publisher: American Physical Society (APS)

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Most cited references 12

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Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive Ionization

Paula Englander‐Golden, Donald Rapp (1965)

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Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

C.K. Birdsall (1991)

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Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz.

Godyak, Piejak (1990)

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Journal

Journal ID (iso-abbrev): Phys. Rev. Lett.

Title: Physical review letters

Publisher: American Physical Society (APS)

ISSN (Electronic): 1079-7114

ISSN (Print): 0031-9007

Publication date (Electronic): Sep 20 1993

Volume: 71

Issue: 12

Article

DOI: 10.1103/PhysRevLett.71.1844

PubMed ID: 10054514

SO-VID: d0182574-c658-488e-9fe4-a7fae9cde0dd

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Collisionless electron heating in an inductively coupled discharge.

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Electron Channelling Contrast Imaging (ECCI)

Most cited references 12

Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive Ionization

Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz.

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Journal

Article

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