Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3using a Monte Carlo‐fluid hybrid model

Kushner, Mark J; Sommerer, Timothy J

doi:10.1063/1.351196

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Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3using a Monte Carlo‐fluid hybrid model

Author(s): Timothy J. Sommerer , Mark J. Kushner

Publication date Created: February 15 1992

Publication date (Print): February 15 1992

Journal: Journal of Applied Physics

Publisher: AIP Publishing

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Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive Ionization

Paula Englander‐Golden, Donald Rapp (1965)

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Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz.

Godyak, Piejak (1990)

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Rotational Excitation and Momentum Transfer Cross Sections for Electrons in\({\mathrm{H}}_{2}\)and\({\mathrm{N}}_{2}\)from Transport Coefficients

A. V. Phelps, L. S. Frost (1962)

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Journal

Title: Journal of Applied Physics

Abbreviated Title: Journal of Applied Physics

Publisher: AIP Publishing

ISSN (Print): 0021-8979

ISSN (Electronic): 1089-7550

Publication date Created: February 15 1992

Publication date (Print): February 15 1992

Volume: 71

Issue: 4

Pages: 1654-1673

Article

DOI: 10.1063/1.351196

SO-VID: cfd240dd-3416-4cbd-947a-301923e435e3

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Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3using a Monte Carlo‐fluid hybrid model

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Numerical Algebra, Matrix Theory, Differential-Algebraic Equations, and Control Theory

Most cited references 50

Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive Ionization

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz.

Rotational Excitation and Momentum Transfer Cross Sections for Electrons in\({\mathrm{H}}_{2}\)and\({\mathrm{N}}_{2}\)from Transport Coefficients

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