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A Novel Junctionless FinFET Structure with Sub-5nm Shell Doping Profile by Molecular Monolayer Doping and Microwave Annealing
Author(s):
Y.-R. Lee
,
T. Cho
,
K. Kao
,
P. -H. Sung
,
Michael K. Hsueh
,
P. -C. Huang
,
C. T. Wu
,
S. Hsu
,
W. HUANG
,
H.-J. Chen
,
Y Li
,
Michael Current
,
B. Hengstebeck
,
J. MARINO
,
T. Büyüklimanli
,
J. M. Shieh
,
T. Chao
,
W. Wu
,
W. I. Yeh
Publication date:
2014
Journal:
International Electron Devices Meeting (IEDM)
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