Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
November
01 2012
Publication date
(Print):
November
01 2012
Publication date
(Electronic):
October
16 2012
Volume: 27
Issue: 11
Page: 115017
Article
DOI: 10.1088/0268-1242/27/11/115017
SO-VID: c6205351-8522-4b62-be17-0974dd1b061e
Copyright © ©
2012