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      Ex situellipsometric investigation of nanocolumns inclination angle of obliquely evaporated silicon thin films

      , , , ,
      Applied Physics Letters
      AIP Publishing

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          Most cited references15

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          Oblique evaporation and surface diffusion

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            Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure

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              Effective medium theory and angular dispersion of optical constants in films with oblique columnar structure

              G.B. Smith (1989)
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                Author and article information

                Journal
                Applied Physics Letters
                Appl. Phys. Lett.
                AIP Publishing
                0003-6951
                1077-3118
                October 10 2005
                October 10 2005
                : 87
                : 15
                : 153103
                Article
                10.1063/1.2084329
                b8febc49-6bb3-4775-8fc4-c57c506901ce
                © 2005
                History

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