Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
Publication date Created:
August
01 1999
Publication date
(Print):
August
01 1999
Volume: 8
Issue: 3
Pages: R21-R44
Article
DOI: 10.1088/0963-0252/8/3/201
SO-VID: b069829e-d7e7-43b4-b558-07377b735ec8
Copyright © ©
1999