Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
October
01 2015
Publication date
(Electronic):
January
19 2017
Volume: 24
Issue: 5
Page: 054005
Article
DOI: 10.1088/0963-0252/24/5/054005
SO-VID: a11b76ac-eee9-4472-b5b0-270ad056afb1
Copyright © ©
2017