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      Formation of Uniform Solid-Phase Epitaxial CoSi2Films by Patterning Method

      Author(s): ,
      Publication date Created:
      Publication date (Print):
      Journal: Japanese Journal of Applied Physics
      Publisher: Japan Society of Applied Physics

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          Journal
          Journal ID (publisher-id): JAPNDE
          Title: Japanese Journal of Applied Physics
          Abbreviated Title: Jpn. J. Appl. Phys.
          Publisher: Japan Society of Applied Physics
          ISSN (Print): 0021-4922
          ISSN (Electronic): 1347-4065
          Publication date Created: August 20 1985
          Publication date (Print): August 20 1985
          Volume: 24
          Issue: Part 1, No. 8
          Pages: 912-917
          Article
          DOI: 10.1143/JJAP.24.912
          SO-VID: 87f15625-98fe-45d4-b981-1c327807e18b
          Copyright © © 1985
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