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      Influence of n+ and p+ doping on the lattice sites of implanted Fe in Si

      Author(s): , , ,
      Publication date Created:
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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Transition metals in silicon

          Eicke R. Weber (1983)
          Article 0 comments Cited 288 times – based on 0 reviews     Review now
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            Iron and its complexes in silicon

            E.R. Weber, H. Hieslmair, A.A. Istratov (1999)
            Article 0 comments Cited 102 times – based on 0 reviews     Review now
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              A fast, preparation‐free method to detect iron in silicon

              G. Zoth, W. Bergholz (1990)
              Article 0 comments Cited 74 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: September 14 2013
                Publication date (Print): September 14 2013
                Volume: 114
                Issue: 10
                Page: 103503
                Article
                DOI: 10.1063/1.4819210
                SO-VID: 86302f5f-3855-4f64-83a7-7170bbbc5ed0
                Copyright © © 2013
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