On the efficiency of the electron sheath heating in capacitively coupled radio frequency discharges in the weakly collisional regime

Pukropski, I.; Kortshagen, U; Buddemeier, U.

doi:10.1063/1.114663

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On the efficiency of the electron sheath heating in capacitively coupled radio frequency discharges in the weakly collisional regime

Author(s): U. Buddemeier , U. Kortshagen , I. Pukropski

Publication date Created: July 10 1995

Publication date (Print): July 10 1995

Journal: Applied Physics Letters

Publisher: AIP Publishing

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Title: Applied Physics Letters

Abbreviated Title: Appl. Phys. Lett.

Publisher: AIP Publishing

ISSN (Print): 0003-6951

ISSN (Electronic): 1077-3118

Publication date Created: July 10 1995

Publication date (Print): July 10 1995

Volume: 67

Issue: 2

Pages: 191-193

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DOI: 10.1063/1.114663

SO-VID: 862f4a7f-22ef-4d9b-829f-f8b39a04ba91

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On the efficiency of the electron sheath heating in capacitively coupled radio frequency discharges in the weakly collisional regime

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Electron Channelling Contrast Imaging (ECCI)

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