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      Efficient high-speed near-infrared Ge photodetectors integrated on Si substrates

      , , , , ,
      Applied Physics Letters
      AIP Publishing

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          High-quality Ge epilayers on Si with low threading-dislocation densities

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            Controlling threading dislocation densities in Ge on Si using graded SiGe layers and chemical-mechanical polishing

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              Metal–semiconductor–metal near-infrared light detector based on epitaxial Ge/Si

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                Author and article information

                Journal
                Applied Physics Letters
                Appl. Phys. Lett.
                AIP Publishing
                0003-6951
                1077-3118
                March 06 2000
                March 06 2000
                : 76
                : 10
                : 1231-1233
                Article
                10.1063/1.125993
                76f7728e-46ec-4efa-883d-572b9e140b55
                © 2000
                History

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