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Evolution of hole depth and shape in ultrashort pulse deep drilling in silicon
Author(s):
S Doring
,
S Richter
,
A Tünnermann
,
S Nolte
,
S RICHTER
Publication date:
2011
Journal:
Applied Physics A
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Scientific Ocean Drilling Expedition Research Results
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DOI::
10.1007/s00339-011-6526-6
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