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      A piezoelectric micropump based on micromachining of silicon

      Author(s): , ,
      Publication date Created:
      Publication date (Print):
      Journal: Sensors and Actuators
      Publisher: Elsevier BV

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          Silicon as a mechanical material

          K.E. Petersen (1982)
          Article 0 comments Cited 435 times – based on 0 reviews     Review now
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            Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium

            J. J. Wortman, R Evans (1965)
            Article 0 comments Cited 207 times – based on 0 reviews     Review now
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              Field Assisted Glass‐Metal Sealing

              Daniel I. Pomerantz, George Wallis (1969)
              Article 0 comments Cited 121 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Sensors and Actuators
                Abbreviated Title: Sensors and Actuators
                Publisher: Elsevier BV
                ISSN (Print): 02506874
                Publication date Created: October 1988
                Publication date (Print): October 1988
                Volume: 15
                Issue: 2
                Pages: 153-167
                Article
                DOI: 10.1016/0250-6874(88)87005-7
                SO-VID: 7283a502-6a44-414b-87e0-4143c56b1fd5
                Copyright © © 1988
                License:

                http://www.elsevier.com/tdm/userlicense/1.0/

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