Self-assembled microactuated XYZ stages for optical scanning and alignment

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Pages: 319-322

Article

DOI: 10.1109/SENSOR.1997.613648

SO-VID: 72780498-15f1-49d7-b4a3-63b5cce01a86

Conference name: International Solid State Sensors and Actuators Conference (Transducers '97)

Conference acronym: SENSOR-97

Conference location: Chicago, IL, USA

Conference date: 16-19 June 1997

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