Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Abbreviated Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Publisher:
American Vacuum Society
ISSN
(Print):
0734-2101
ISSN
(Electronic):
1520-8559
Publication date Created:
July
1987
Publication date
(Print):
July
1987
Volume: 5
Issue: 4
Pages: 1898-1902
Article
DOI: 10.1116/1.574481
SO-VID: 71e93f4d-1a09-49bf-8274-bcad3717a99d
Copyright © ©
1987