Synergistic effects of vacuum ultraviolet radiation, ion bombardment, and heating in 193nm photoresist roughening and degradation

Andes, C.; Bruce, R. L.; Weilnboeck, F.; Graves, D. B.; Oehrlein, G. S.; Hudson, E A; Engelmann, S; Nest, D.

doi:10.1063/1.2912028

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Synergistic effects of vacuum ultraviolet radiation, ion bombardment, and heating in 193nm photoresist roughening and degradation

Author(s): D. Nest , D. B. Graves , S. Engelmann , R. L. Bruce , F. Weilnboeck , G. S. Oehrlein , C. Andes , E. A. Hudson

Publication date Created: April 14 2008

Publication date (Print): April 14 2008

Journal: Applied Physics Letters

Publisher: AIP Publishing

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Industrial processing of polymers by low-pressure plasmas: the role of VUV radiation

M.R. Wertheimer, A.C. Fozza, A. Holländer (1999)

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Plasma-surface interactions of model polymers for advanced photoresists using C[sub 4]F[sub 8]∕Ar discharges and energetic ion beams

P Lazzeri, E. Iacob, M Anderle … (2007)

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Modification of the micro- and nanotopography of several polymers by plasma treatments

Pierangelo Groening, Martine Collaud Coen, Louis Schlapbach … (2003)

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Journal

Title: Applied Physics Letters

Abbreviated Title: Appl. Phys. Lett.

Publisher: AIP Publishing

ISSN (Print): 0003-6951

ISSN (Electronic): 1077-3118

Publication date Created: April 14 2008

Publication date (Print): April 14 2008

Volume: 92

Issue: 15

Page: 153113

Article

DOI: 10.1063/1.2912028

SO-VID: 6d77b9b2-a5b3-4e4e-8c55-59ecd25aca3c

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Synergistic effects of vacuum ultraviolet radiation, ion bombardment, and heating in 193nm photoresist roughening and degradation

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Negative Pressure Wound Therapy

Most cited references 19

Industrial processing of polymers by low-pressure plasmas: the role of VUV radiation

Plasma-surface interactions of model polymers for advanced photoresists using C[sub 4]F[sub 8]∕Ar discharges and energetic ion beams

Modification of the micro- and nanotopography of several polymers by plasma treatments

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