Thermo-acoustic engineering of silicon microresonators via evanescent waves

Low loss Bulk Acoustic Wave devices are considered from the point of view of the solid state approach as phonon-confining cavities. We demonstrate effective design of such acoustic cavities with phonon-trapping techniques exhibiting extremely high quality factors for trapped longitudinally-polarized phonons of various wavelengths. Quality factors of observed modes exceed 1 billion, with a maximum Q-factor of 8 billion and Q × f product of 1.6 · 1018 at liquid helium temperatures. Such high sensitivities allow analysis of intrinsic material losses in resonant phonon systems. Various mechanisms of phonon losses are discussed and estimated. Show more