Title:
Journal of Microelectromechanical Systems
Abbreviated Title:
J. Microelectromech. Syst.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
1057-7157
ISSN
(Electronic):
1941-0158
Publication date Created:
December
2015
Publication date
(Print):
December
2015
Volume: 24
Issue: 6
Pages: 1989-1997
Article
DOI: 10.1109/JMEMS.2015.2457782
SO-VID: 457e30f2-ca15-43bb-a22b-6a2611108349
Copyright © ©
2015