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      Cubic silsesquioxanes as a green, high-performance mold material for nanoimprint lithography.

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          Author and article information

          Journal
          Adv Mater
          Advanced materials (Deerfield Beach, Fla.)
          Wiley
          1521-4095
          0935-9648
          Jan 18 2011
          : 23
          : 3
          Affiliations
          [1 ] Polymers Division, National Institute of Standards and Technology (NIST), 100 Bureau Dr., Gaithersburg, MD 20899, USA. hyun.ro@nist.gov
          Article
          10.1002/adma.201001761
          20715068
          3ba6b1d8-cc72-4e19-bba9-35df32ab4926
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