Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
May
01 2005
Publication date
(Print):
May
01 2005
Publication date
(Electronic):
May
04 2005
Volume: 14
Issue: 2
Pages: S18-S25
Article
DOI: 10.1088/0963-0252/14/2/S03
SO-VID: 3b64c62a-dbf1-4f8a-8827-f3749315fac2
Copyright © ©
2005