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      Chip-less wireless electronic skins by remote epitaxial freestanding compound semiconductors

      1 , 2 , 3 , 1 , 2 , 1 , 2 , 1 , 2 , 1 , 2 , 4 , 1 , 2 , 1 , 2 , 5 , 1 , 2 , 1 , 2 , 6 , 7 , 1 , 2 , 1 , 2 , 1 , 2 , 2 , 8 , 8 , 9 , 7 , 1 , 10 , 1 , 1 , 1 , 7 , 8 , 11 , 12 , 12 , 13 , 14 , 15 , 1 , 16 , 1 , 17 , 18 , 1 , 2 , 19
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      American Association for the Advancement of Science (AAAS)

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          Abstract

          Recent advances in flexible and stretchable electronics have led to a surge of electronic skin (e-skin)–based health monitoring platforms. Conventional wireless e-skins rely on rigid integrated circuit chips that compromise the overall flexibility and consume considerable power. Chip-less wireless e-skins based on inductor-capacitor resonators are limited to mechanical sensors with low sensitivities. We report a chip-less wireless e-skin based on surface acoustic wave sensors made of freestanding ultrathin single-crystalline piezoelectric gallium nitride membranes. Surface acoustic wave–based e-skin offers highly sensitive, low-power, and long-term sensing of strain, ultraviolet light, and ion concentrations in sweat. We demonstrate weeklong monitoring of pulse. These results present routes to inexpensive and versatile low-power, high-sensitivity platforms for wireless health monitoring devices.

          Chip-less electronic skin

          Flexible electronic materials, or e-skins, can be limited by the need to include rigid components. A range of techniques have emerged to bypass this problem, including approaches for wireless communication and charging based on silicon, carbon nanotubes, or conducting polymers. Kim et al . show that epitaxially grown, single-crystalline gallium nitride films on flexible substrates can be used for chip-less, flexible e-skins. The main advantage is that the material is flexible and breathable, thus providing better comfort. The devices convert electrical energy into surface acoustic waves using a piezoelectric resonator. The resonator is sensitive to changes in strain, mass changes due to the absorption or loss of ions, and ultraviolet light, all of which can be used for different sensing measurements. —MSL

          Abstract

          Single-crystalline gallium nitride nanomembranes enable high-sensitivity surface acoustic wave sensors for wireless electronic skin.

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          Most cited references41

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          Fully integrated wearable sensor arrays for multiplexed in situ perspiration analysis.

          Wearable sensor technologies are essential to the realization of personalized medicine through continuously monitoring an individual's state of health. Sampling human sweat, which is rich in physiological information, could enable non-invasive monitoring. Previously reported sweat-based and other non-invasive biosensors either can only monitor a single analyte at a time or lack on-site signal processing circuitry and sensor calibration mechanisms for accurate analysis of the physiological state. Given the complexity of sweat secretion, simultaneous and multiplexed screening of target biomarkers is critical and requires full system integration to ensure the accuracy of measurements. Here we present a mechanically flexible and fully integrated (that is, no external analysis is needed) sensor array for multiplexed in situ perspiration analysis, which simultaneously and selectively measures sweat metabolites (such as glucose and lactate) and electrolytes (such as sodium and potassium ions), as well as the skin temperature (to calibrate the response of the sensors). Our work bridges the technological gap between signal transduction, conditioning (amplification and filtering), processing and wireless transmission in wearable biosensors by merging plastic-based sensors that interface with the skin with silicon integrated circuits consolidated on a flexible circuit board for complex signal processing. This application could not have been realized using either of these technologies alone owing to their respective inherent limitations. The wearable system is used to measure the detailed sweat profile of human subjects engaged in prolonged indoor and outdoor physical activities, and to make a real-time assessment of the physiological state of the subjects. This platform enables a wide range of personalized diagnostic and physiological monitoring applications.
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            Epidermal electronics.

            We report classes of electronic systems that achieve thicknesses, effective elastic moduli, bending stiffnesses, and areal mass densities matched to the epidermis. Unlike traditional wafer-based technologies, laminating such devices onto the skin leads to conformal contact and adequate adhesion based on van der Waals interactions alone, in a manner that is mechanically invisible to the user. We describe systems incorporating electrophysiological, temperature, and strain sensors, as well as transistors, light-emitting diodes, photodetectors, radio frequency inductors, capacitors, oscillators, and rectifying diodes. Solar cells and wireless coils provide options for power supply. We used this type of technology to measure electrical activity produced by the heart, brain, and skeletal muscles and show that the resulting data contain sufficient information for an unusual type of computer game controller.
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              Multifunctional wearable devices for diagnosis and therapy of movement disorders.

              Wearable systems that monitor muscle activity, store data and deliver feedback therapy are the next frontier in personalized medicine and healthcare. However, technical challenges, such as the fabrication of high-performance, energy-efficient sensors and memory modules that are in intimate mechanical contact with soft tissues, in conjunction with controlled delivery of therapeutic agents, limit the wide-scale adoption of such systems. Here, we describe materials, mechanics and designs for multifunctional, wearable-on-the-skin systems that address these challenges via monolithic integration of nanomembranes fabricated with a top-down approach, nanoparticles assembled by bottom-up methods, and stretchable electronics on a tissue-like polymeric substrate. Representative examples of such systems include physiological sensors, non-volatile memory and drug-release actuators. Quantitative analyses of the electronics, mechanics, heat-transfer and drug-diffusion characteristics validate the operation of individual components, thereby enabling system-level multifunctionalities.
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                Author and article information

                Contributors
                Journal
                Science
                Science
                American Association for the Advancement of Science (AAAS)
                0036-8075
                1095-9203
                August 19 2022
                August 19 2022
                : 377
                : 6608
                : 859-864
                Affiliations
                [1 ]Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
                [2 ]Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
                [3 ]Department of Electrical Engineering and Computer Science, University of Cincinnati, Cincinnati, OH 45219, USA.
                [4 ]School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 61005, South Korea.
                [5 ]Department of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, South Korea.
                [6 ]Division of Advanced Materials Engineering, Jeonbuk National University, Jeonju 54896, South Korea.
                [7 ]Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
                [8 ]School of Chemical and Biological Engineering, Institute of Chemical Process, Seoul National University, Seoul 08826, South Korea.
                [9 ]Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 05006, South Korea.
                [10 ]School of Micro-Nano Electronics, Zhejiang University, Hangzhou 311200 Zhejiang, People’s Republic of China.
                [11 ]Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul 08826, South Korea.
                [12 ]Post-Silicon Semiconductor Institute, Korea Institute of Science and Technology (KIST), Seoul 02792, South Korea.
                [13 ]Division of Nano and Information Technology, KIST School, Korea University of Science and Technology, Seoul 02792, South Korea.
                [14 ]Department of Mechanical Engineering, Seoul National University, Seoul 08826, South Korea.
                [15 ]Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904, USA.
                [16 ]Department of Mechanical Engineering and Materials Science, Institute of Materials Science and Engineering, Washington University in St. Louis, MO 63139, USA.
                [17 ]Department of Materials Science and Engineering, Westlake University, Hangzhou 310024 Zhejiang, People’s Republic of China.
                [18 ]Skincare Division, Amorepacific R&D Center, Yongin 17074, South Korea.
                [19 ]Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
                Article
                10.1126/science.abn7325
                35981034
                30c501a5-892b-467a-9b60-94eb0d0d728b
                © 2022
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