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      Optimal use of pentaprisms in highly accurate deflectometric scanning

      Measurement Science and Technology
      IOP Publishing

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          The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY

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            Design Of A Long Trace Surface Profiler

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              The penta‐prism LTP: A long‐trace‐profiler with stationary optical head and moving penta prisma)

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                Author and article information

                Journal
                Measurement Science and Technology
                Meas. Sci. Technol.
                IOP Publishing
                0957-0233
                1361-6501
                January 01 2007
                January 01 2007
                November 30 2006
                : 18
                : 1
                : 115-125
                Article
                10.1088/0957-0233/18/1/014
                2e67c0ff-3659-4a5c-88b3-76bc8dbb9c29
                © 2006
                History

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