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      Steric hindrance effects in atomic layer epitaxy of InAs

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      Applied Physics Letters
      AIP Publishing

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          Molecular Layer Epitaxy

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            Kinetic Limits of Monolayer Growth on (001) Gaas by Organometallic Chemical-vapor Deposition

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              Atomic layer epitaxy of III‐V binary compounds

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                Author and article information

                Journal
                Applied Physics Letters
                Appl. Phys. Lett.
                AIP Publishing
                0003-6951
                1077-3118
                July 17 1989
                July 17 1989
                : 55
                : 3
                : 244-246
                Article
                10.1063/1.101920
                2d0d0c90-d17d-4158-be25-f29ba49c0b0c
                © 1989
                History

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