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Effect of Soft Agglomerates on CMP Slurry Performance
Author(s):
G.Bahar Basim
,
Brij M. Moudgil
,
GB Basim
,
BM Moudgil
Publication date:
2002
Journal:
Journal of Colloid and Interface Science
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Functional role of amyloid
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DOI::
10.1006/jcis.2002.8352
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