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      Kelvin probe characterization of buried graphitic microchannels in single-crystal diamond

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          Abstract

          In this work, we present an investigation by Kelvin Probe Microscopy (KPM) of buried graphitic microchannels fabricated in single-crystal diamond by direct MeV ion microbeam writing. Metal deposition of variable-thickness masks was adopted to implant channels with emerging endpoints and high temperature annealing was performed in order to induce the graphitization of the highly-damaged buried region. When an electrical current was flowing through the biased buried channel, the structure was clearly evidenced by KPM maps of the electrical potential of the surface region overlying the channel at increasing distances from the grounded electrode. The KPM profiling shows regions of opposite contrast located at different distances from the endpoints of the channel. This effect is attributed to the different electrical conduction properties of the surface and of the buried graphitic layer. The model adopted to interpret these KPM maps and profiles proved to be suitable for the electronic characterization of buried conductive channels, providing a non-invasive method to measure the local resistivity with a micrometer resolution. The results demonstrate the potential of the technique as a powerful diagnostic tool to monitor the functionality of all-carbon graphite/diamond devices to be fabricated by MeV ion beam lithography.

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          Kelvin probe force microscopy and its application

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            High‐resolution capacitance measurement and potentiometry by force microscopy

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              Resolution and contrast in Kelvin probe force microscopy

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                Author and article information

                Journal
                2016-08-25
                Article
                10.1063/1.4905425
                1608.07126
                0b2ff650-0c69-47ad-bb91-173b39b832b1

                http://arxiv.org/licenses/nonexclusive-distrib/1.0/

                History
                Custom metadata
                Journal of Applied Physics 117, 024103 (2015)
                21 pages, 5 figures
                cond-mat.mtrl-sci

                Condensed matter
                Condensed matter

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