Title:
Microsystem Technologies
Abbreviated Title:
Microsyst Technol
Publisher:
Springer Nature
ISSN
(Print):
0946-7076
ISSN
(Electronic):
1432-1858
Publication date Created:
April
2017
Publication date
(Print):
February
2016
Volume: 23
Issue: 4
Pages: 875-888
Article
DOI: 10.1007/s00542-016-2852-0
SO-VID: 084b4e58-ec63-43ba-84bd-cb23e9e86a98
Copyright © ©
2017