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Effects of Ion-Beam-Irradiation on Morphology and Densification of CeO
2
Films Prepared by Ion-Beam-Assisted Deposition
Author(s):
Ippei Shimizu
,
Yuichi Setsuhara
,
Shoji Miyake
,
Hidenori Saitou
,
Masao Kumagai
Publication date:
2000
Journal:
Japanese Journal of Applied Physics
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DOI::
10.1143/JJAP.39.4138
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