Title:
Journal of Microelectromechanical Systems
Abbreviated Title:
J. Microelectromech. Syst.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
10577157
Publication date
(Print):
Dec. 1999
Volume: 8
Issue: 4
Pages: 358-365
Article
DOI: 10.1109/84.809049
SO-VID: 3f8fa484-7d63-426d-9547-744c855b3621
Copyright © ©
1999