Ultrastretchable, transparent triboelectric nanogenerator as electronic skin for biomechanical energy harvesting and tactile sensing

The development of an electronic skin is critical to the realization of artificial intelligence that comes into direct contact with humans, and to biomedical applications such as prosthetic skin. To mimic the tactile sensing properties of natural skin, large arrays of pixel pressure sensors on a flexible and stretchable substrate are required. We demonstrate flexible, capacitive pressure sensors with unprecedented sensitivity and very short response times that can be inexpensively fabricated over large areas by microstructuring of thin films of the biocompatible elastomer polydimethylsiloxane. The pressure sensitivity of the microstructured films far surpassed that exhibited by unstructured elastomeric films of similar thickness, and is tunable by using different microstructures. The microstructured films were integrated into organic field-effect transistors as the dielectric layer, forming a new type of active sensor device with similarly excellent sensitivity and response times.

Transparent, flexible and high efficient power sources are important components of organic electronic and optoelectronic devices. In this work, based on the principle of the previously demonstrated triboelectric generator, we demonstrate a new high-output, flexible and transparent nanogenerator by using transparent polymer materials. We have fabricated three types of regular and uniform polymer patterned arrays (line, cube, and pyramid) to improve the efficiency of the nanogenerator. The power generation of the pyramid-featured device far surpassed that exhibited by the unstructured films and gave an output voltage of up to 18 V at a current density of ∼0.13 μA/cm(2). Furthermore, the as-prepared nanogenerator can be applied as a self-powered pressure sensor for sensing a water droplet (8 mg, ∼3.6 Pa in contact pressure) and a falling feather (20 mg, ∼0.4 Pa in contact pressure) with a low-end detection limit of ∼13 mPa.

Sensory receptors in human skin transmit a wealth of tactile and thermal signals from external environments to the brain. Despite advances in our understanding of mechano- and thermosensation, replication of these unique sensory characteristics in artificial skin and prosthetics remains challenging. Recent efforts to develop smart prosthetics, which exploit rigid and/or semi-flexible pressure, strain and temperature sensors, provide promising routes for sensor-laden bionic systems, but with limited stretchability, detection range and spatio-temporal resolution. Here we demonstrate smart prosthetic skin instrumented with ultrathin, single crystalline silicon nanoribbon strain, pressure and temperature sensor arrays as well as associated humidity sensors, electroresistive heaters and stretchable multi-electrode arrays for nerve stimulation. This collection of stretchable sensors and actuators facilitate highly localized mechanical and thermal skin-like perception in response to external stimuli, thus providing unique opportunities for emerging classes of prostheses and peripheral nervous system interface technologies.