Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
July
01 2005
Publication date
(Print):
July
01 2005
Volume: 20
Issue: 7
Pages: S266-S280
Article
DOI: 10.1088/0268-1242/20/7/018
SO-VID: 9bf120b7-5968-442a-a580-b5a7befe4e6d
Copyright © ©
2005