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      Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends

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      Journal of Micromechanics and Microengineering
      IOP Publishing

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          Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers

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            Materials issues in microelectromechanical systems (MEMS)

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              Young’s modulus measurements of thin films using micromechanics

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                Author and article information

                Journal
                Journal of Micromechanics and Microengineering
                J. Micromech. Microeng.
                IOP Publishing
                0960-1317
                1361-6439
                July 01 2003
                July 01 2003
                June 13 2003
                : 13
                : 4
                : S23-S33
                Article
                10.1088/0960-1317/13/4/304
                beccc7d7-87ea-4960-ab5d-679c9be76c4e
                © 2003
                History

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