Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum

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Journal

Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Abbreviated Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Publisher: American Vacuum Society

ISSN (Print): 0734-2101

ISSN (Electronic): 1520-8559

Publication date Created: July 1987

Publication date (Print): July 1987

Volume: 5

Issue: 4

Pages: 2173-2179

Article

DOI: 10.1116/1.574948

SO-VID: ec3b3d23-4fc1-479f-9702-010820aa7157

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