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2,043
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Initial results from an extreme ultraviolet interferometer operating with a compact laser plasma source
Author(s):
Avijit Ray-Chaudhuri
,
Chris Krenz
,
R. J. NISSEN
,
S. A. Haney
,
C. T. Fields
,
W. C. Sweatt
,
A. A. MacDowell
Publication date:
1996
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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Scientific Ocean Drilling Expedition Research Results
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DOI::
10.1116/1.588624
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