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Electron backscattering diffraction investigation of focused ion beam surfaces

T. L. Matteson, S. W. Schwarz, E. C. Houge … (2002)

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Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition

S. Lipp (1996)

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Investigations on the topology of structures milled and etched by focused ion beams

S. Lipp (1996)

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Publication date (Print): 2005

Pages: 247-268

DOI: 10.1007/0-387-23313-X_12

SO-VID: bdfbb162-1bb7-4b3c-8296-6d22d54de081

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Dual-Beam (FIB-SEM) Systems

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Most cited references 8

Electron backscattering diffraction investigation of focused ion beam surfaces

Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition

Investigations on the topology of structures milled and etched by focused ion beams

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